Main Equipment
Manufacturing Facilities
Vacuum disposition machines for thin films
| φ800 | 3 |
| φ800 for metallic film | 1 |
| φ900 | 2 |
| φ1100 | 1 |
| φ1300 | 1 |
Ion planting machines
| φ900 | 3 |
Plasma assistant device
| φ1300 | 2 |
Ultrasonic washer
| 9-layer | 1 |
| Full-automatic 6-layer washer | 1 |
Evaluation and Measurement Equipment
Spectrophotometers
| HITACHI U-4000 | 2 |
| HITACHI U-4100 | 1 |
| NIHON BUNKO V-550 | 1 |
Atomic Force Microscope
| Keyence VN-8000 | 1 |
Ohters
Spectrophotometers
| Blast machine | 2 |
| Constant temperture humidity equipment (Encironmental examination machine) |
1 |
| Software for thin film design | Many |
